为了实现更好的线性，作者设计（发明）了一种新型的接触式电容压力传感器（DDTMCPS）。
To achieve the characteristics of better linearity, a new type of touch mode capacitive pressure sensor named as DDTMCPS is devised, which has a pair of deformable sensing diaphragms.
本文提出了一种电容式压力传感器的温度补偿方法，它适用于在不同输入压力下的温度补偿。
The present paper puts forward a new method to realize the temperature compensation, especially, at various levels of input pressure.
提出了一种基于径向基函数(RBF)神经网络的电容式压力传感器温度补偿方法。
A new method for realizing the temperature compensation of capacitive pressure transducer based on radial basis function (RBF) neural network is proposed.
基于神经网络的电容式压力传感器非线性校正。
Based on neural network of capacitive pressure sensor nonlinear correction.
还可以采取带活塞动极膜片制成测量高压的单电容式压力传感器。
Also can be used with piston diaphragm made of a very dynamic measurement of high voltage, single capacitive pressure sensor.
从应用开发MEMS产品的实用角度出发，介绍了利用硅一硅键合技术制作的微型电容式压力传感器，给出了详细的制作工艺及主要工艺步骤图。
Introduced the capacitive pressure microsensor produced by Si-Si bonding technology in terms of the practicality of MEMS products. The producing technology and major diagrams were given in detail.
研究了微电容式压力传感器的差动电容结构设计和微谐振式压力传感器的微谐振子结构设计，利用ANSYS软件对微差动电容的结构进行了优化设计。
A micro differential capacitance and a micro harmonic oscillator are studied and designed. The structure of the micro differential capacitance is optimized by use of the ANSYS software.
分析结果表明，与常规的双极板微型电容式压力传感器相比，新型结构压力传感器的线性度改善了48.38%，达到了1.6%。
Comparison of the MEMS-based capacitive pressure sensor with a general structure sensor, the output linearity of the proposed sensor has been improved by 48.38%, reaching 1.6%.
另外厚膜电容式压力传感器还有一种重要的应用，它可以用来对位移进行测量，例如对压电陶瓷PZT的精密位移测量。
There is also an important application that can be used to measure displacement, for instance, PZT piezoelectric ceramic precision displacement measurement.
另外厚膜电容式压力传感器还有一种重要的应用，它可以用来对位移进行测量，例如对压电陶瓷PZT的精密位移测量。
There is also an important application that can be used to measure displacement, for instance, PZT piezoelectric ceramic precision displacement measurement.
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