微带阵列以其优越的性能在很多领域得到了应用，而且其平面介质衬底结构也随着应用的广泛而趋向多层化。
Microstrip antenna arrays with excellent performance has been applied in many different fields, and its planar dielectric substrate structure has a multilayer tendency with the application.
本发明公开了一种形成半导体结构的方法，这种半导体结构包括具有与下面的衬底不同的极性的不连续的非平面副集电极。
Disclosed is a method of forming a semiconductor structure that includes a discontinuous non-planar sub-collector having a different polarity than the underlying substrate.
以硅烷和氧化二氮作为反应气体，采用等离子体增强化学气相沉积(PECVD)技术，不使用掺杂，在单晶硅衬底上制备了用于平面光波导的二氧化硅薄膜。
Without doping, plasma enhanced chemical vapor deposition (PECVD) of silica films on si substrates with gas mixtures of SiH_4 and N_2O is considered.
制作的单晶衬底平面应与晶体001面呈一夹角，沿着晶体001面倾斜的方向刻蚀成超导薄膜微桥。
The prepared monocrystalline substrate plane has an Angle to crystalline 001 plane and superconductive film microbridge is etched in the inclined direction to 001 plane.
为了探测衬底是否处在检查设备的焦平面上，一种光学聚焦传感器被布置为通过物镜接收辐射光束。
To detect whether a substrate is in a focal plane of an inspection apparatus, an optical focus sensor is arranged to receive a radiation beam via an objective lens.
所述终端受动器 包含自由端，其具有配置为支撑衬底的衬底支撑平面，并使衬底相对于水平面 成第一角度定位；
The end effector comprises a free end having a substrate supporting plane configured to support a substrate and positioned that substrate at a first angle relative to a horizontal plane.
所述终端受动器 包含自由端，其具有配置为支撑衬底的衬底支撑平面，并使衬底相对于水平面 成第一角度定位；
The end effector comprises a free end having a substrate supporting plane configured to support a substrate and positioned that substrate at a first angle relative to a horizontal plane.
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