提出了一种利用静电作用下悬臂梁的吸合电压提取MEMS薄膜沿厚度方向的平均应力梯度及弹性模量的方法，该方法的关键在于实现悬臂梁吸合电压的快速、精确计算。
A novel method for calculating Youngs modulus and residual stress of a MEMS film is proposed based on pull-in voltages of a set of fixed-fixed beams.
提出了一种利用静电作用下悬臂梁的吸合电压提取MEMS薄膜沿厚度方向的平均应力梯度及弹性模量的方法，该方法的关键在于实现悬臂梁吸合电压的快速、精确计算。
A novel method for calculating Youngs modulus and residual stress of a MEMS film is proposed based on pull-in voltages of a set of fixed-fixed beams.
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