分析了系统精度，用双频激光干涉仪测量系统组成部分的误差，并通过软件方法进行补偿。
The system accuracy is analyzed, and the systematic error is measured by 5528A Laser Measurment System and calibrated by software.
短基线干涉仪系统角度测量精度的研究。
Research on Angle measurement accuracy of short-baseline interferometer system.
研究建立一种光学记录速度干涉仪系统(OR VIS)，用于激光产生冲击波研究物质状态方程实验中的参数测量。
An optically recording velocity interferometer system (ORVIS) is constructed. It is applied to laser-driven shock experiments as a method for equation of state (EOS) measurement.
该系统还可修正干涉仪的误差、测量波面平均曲率等。
The system is also capable of correcting errors caused by interferometers and measuring average wavefront curvature.
由于光栅干涉测量系统以光栅栅距作为测量基准，相对于传统干涉仪，光栅尺系统受环境因素造成的测量误差影响较小。
Because the measurement standard of grating system is grating pitch, compared to usual interferometer, diffractive grating, system reduces environment influence on measurement accuracy.
共光路外差干涉仪具有很高的分辨率，但因为安装、调试误差会产生非线性误差，影响系统的测量精度。
Nonlinear errors caused by mis-installation of common-path heterodyne interferometer affected the measurement precision of the system.
为了实现较大的偏转角度测量，该平行平板干涉仪引入了一位置探测系统。
A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection Angle measurement.
数字式激光平面干涉仪是用于测量光学元件面形和无焦光学系统波像差的光学仪器。
Digital laser plane interferometer is used to measure the surface of optical components and the wavefront aberration of non-confocal optical system.
其中一个光纤迈克尔逊干涉仪通过一个一阶反馈来补偿环境干扰的影响，实现对该测量系统的稳定；
One of the fiber interferometers is used to stabilise the system while the other one is used to perform the measurement task.
对激光自混合干涉仪的系统稳定性与测量分辨力进行了实验研究，给出了改善系统稳定性与测量分辨力的有效方法。
The system stability and measurement resolution are experimentally studied, and the method for improving system stability and measurement resolution is given.
在干涉检验过程中，被检元件的面形误差检测精度受到干涉仪系统结构的影响，从而降低测量结果的可靠性。
During the optical interference testing, the measurement accuracy of the tested surface is influenced by the system structure of interferometer, which will decrease the reliability of the measurement.
建立了用于绝对距离测量的波长扫描光纤干涉仪实验系统。
A wavelength scanning fiber optic interferometer for absolute distance measurement has been proposed.
四路激光跟踪三维坐标测量系统的测量精度在很大程度上取决于四路干涉仪的布局。
The measuring accuracy of four-beam laser tracking system for 3d coordinate measurement in large degree depends on the arrangement of the interferometers.
利用单频激光干涉仪作为测量仪，通过专用变形量测量系统，测量量块在不同姿态下支撑位置对量块中心长度的影响。
Adopting laser interferometer as measuring datum, length deflection of gauge blocks are measured in different gestures by developing an adjustable platform.
利用单频激光干涉仪作为测量仪，通过专用变形量测量系统，测量量块在不同姿态下支撑位置对量块中心长度的影响。
Adopting laser interferometer as measuring datum, length deflection of gauge blocks are measured in different gestures by developing an adjustable platform.
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