提出了用于提高X射线光刻对准系统自动对准效率和对准精度的图像边缘增强技术，并进行了数值分析。

The image edge-enhanced technique was proposed to improve the automatic aligning efficiency and aligning accuracy in the X-ray lithography aligning system, and the numerical analysis was given.

youdao

提出了用于提高X射线光刻对准系统自动对准效率和对准精度的图像边缘增强技术，并进行了数值分析。

The image edge-enhanced technique was proposed to improve the automatic aligning efficiency and aligning accuracy in the X-ray lithography aligning system, and the numerical analysis was given.

youdao