本文用激光探针测量了砷离子注入硅在CW CO_2激光退火过程中的实时分辨反射率。
The time-resolved optical reflectivity of as ion-implanted silicon during CW CO_2 laser annealing has been measured by using laser probes.
本文用激光探针测量了砷离子注入硅在CW CO_2激光退火过程中的实时分辨反射率。
The time-resolved optical reflectivity of as ion-implanted silicon during CW CO_2 laser annealing has been measured by using laser probes.
应用推荐