另外，当有源硅区之间的隔离必须充当一离子注入步骤的一自行对准阻挡层时，所述多晶硅瓦片本身增加所述隔离的厚度。

In addition, the poly tiles themselves increase the thickness of the isolation between active silicon regions when it must serve as a self-aligned blocking layer for an ion implantation step.

youdao

另外，当有源硅区之间的隔离必须充当一离子注入步骤的一自行对准阻挡层时，所述多晶硅瓦片本身增加所述隔离的厚度。

In addition, the poly tiles themselves increase the thickness of the isolation between active silicon regions when it must serve as a self-aligned blocking layer for an ion implantation step.

youdao