由于本实用新型偏压采用电子—离子加速—离子结合形式，使基板(工件)所收集到的离子流是靶电流的10—15%。
Because the utility model adopts the form of electron-acceleration of ion-ion bonding so as to cause ion flow collected by a base plate (a workpiece) is only 10 to 15 percent of target current.
还揭示一种电流分配器来控制导向一基板不同部位的电流密度。
One kind of current distributor is used to control the current density of the different base board parts.
还揭示一种电流分配器来控制导向一基板不同部位的电流密度。
One kind of current distributor is used to control the current density of the different base board parts.
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