接近式光刻中一般采用柯勒照明系统，并采用蝇眼透镜形成多点光源均匀掩模面的光场分布。
Kohler illumination was used in proximity lithography, and a flys eye lens was adopted to form multi-point source in order to uniform the light intensity on the mask plane.
光源模块化均匀分布，光亮度好，无暗区，能提供完整的日常室内照明。
The light source USES modular design, and has the characteristics of good lightness and no dark space. The series can provide normal indoor lighting service.
在假定照明光源是均匀分布的小圆形光源和狭缝为一矩形的条件下，分别利用几何光学和傅立叶光学给出不同屈光度下光强分布情况。
In the case of little circular light source and rectangular slit, the simulation results of different myopic diopters are obtained by geometrical optical theory and Fourier optics respectively.
在假定照明光源是均匀分布的小圆形光源和狭缝为一矩形的条件下，分别利用几何光学和傅立叶光学给出不同屈光度下光强分布情况。
In the case of little circular light source and rectangular slit, the simulation results of different myopic diopters are obtained by geometrical optical theory and Fourier optics respectively.
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