对于一定的薄膜名义厚度,硅油基底温度越高,中心区域的凝聚体覆盖率越小。
The film thickness corresponding to the saturation coverage ratio decreases obviously with the increase of the substrate temperature.
对于一定的薄膜名义厚度,硅油基底温度越高,中心区域的凝聚体覆盖率越小。
The film thickness corresponding to the saturation coverage ratio decreases obviously with the increase of the substrate temperature.
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