该装置具有结构简单，低损伤和各向异性刻蚀的优点。

It has advantages of sample structure, low damage and anisotropic etching.

youdao

报道了一种利用旋转体自身角速度作为驱动力，通过各向异性刻蚀硅片制作的硅微机械陀螺。

This paper reported a silicon micromachined gyroscope that is driven by the rotating carrier's angular velocity. The silicon chip was manufactured by anisotropy etching.

youdao

报道了一种利用旋转体自身角速度作为驱动力，通过各向异性刻蚀硅片制作的硅微机械陀螺。

This paper reported a silicon micromachined gyroscope that is driven by the rotating carrier's angular velocity. The silicon chip was manufactured by anisotropy etching.

youdao