上述感射线性树脂组合物含有（A）碱可溶性树脂、（B）1，2-醌二叠氮化合物和（C）具有硅氧烷链的特定聚合物。

The radiation sensitive linear resin composition comprises (A)alkali soluble resin, (B) 1,2-quinone-bi-azide compound and (C) special polymer with siloxane chain.

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上述感射线性树脂组合物含有（A）碱可溶性树脂、（B）1，2-醌二叠氮化合物和（C）具有硅氧烷链的特定聚合物。

The radiation sensitive linear resin composition comprises (A)alkali soluble resin, (B) 1,2-quinone-bi-azide compound and (C) special polymer with siloxane chain.

youdao