对于大口径精密投影光刻制版镜头来说,透镜的应力变形和中心误差对整个系统的成像质量有较大影响。
For big aperture's precision photolithographic plate-making lenses, the stress distortion and centering errors of lenses can make a bad effect on imaging quality.
对于大口径精密投影光刻制版镜头来说,透镜的应力变形和中心误差对整个系统的成像质量有较大影响。
For big aperture's precision photolithographic plate-making lenses, the stress distortion and centering errors of lenses can make a bad effect on imaging quality.
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