采用双电容器的结构设计了一种新型双电容式料位传感器。
A new type of double capacitive material level sensor which adopts a structure of double-capacitor is designed.
分析结果表明，与常规的双极板微型电容式压力传感器相比，新型结构压力传感器的线性度改善了48.38%，达到了1.6%。
Comparison of the MEMS-based capacitive pressure sensor with a general structure sensor, the output linearity of the proposed sensor has been improved by 48.38%, reaching 1.6%.
分析结果表明，与常规的双极板微型电容式压力传感器相比，新型结构压力传感器的线性度改善了48.38%，达到了1.6%。
Comparison of the MEMS-based capacitive pressure sensor with a general structure sensor, the output linearity of the proposed sensor has been improved by 48.38%, reaching 1.6%.
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