采用双压电晶片振子为移动机构的驱动源,提出可以实现二维平面移动的新型压电驱动机构。
A new type of the PZT driving device to realize the planar movement by using the bimorph oscillator as the driver was presented.
采用双压电晶片振子为移动机构的驱动源,提出可以实现二维平面移动的新型压电驱动机构。
A new type of the PZT driving device to realize the planar movement by using the bimorph oscillator as the driver was presented.
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