该文以碳粉掺杂的聚合物为敏感膜，以叉指电极为基底制作了测定挥发性有机气体的化学阻抗传感器。
A chemiresistor sensor was fabricated for the analysis of volatile organic compounds(VOCs) with carbon black(CB)-polymer composite as sensing film and interdigital electrodes.
直热式叉指电极工艺简单，无需专门设计加热层，直接加热效果好，功耗低。
The direct thermal interdigital electrode has simple process, does not need to specially design a heating layer, has good direct heating effect and low power consumption.
本文研制的体硅工艺微振动传感器，其敏感单元为叉指电极结构，弹性梁采用新颖的多级折梁结构。
The sensing element of the bulk machining vibration sensors is consisted of comb electrodes, and its elastic beams are novel multi-folding beams.
由于其驱动信号是可以由结构简单的叉指电极激发的声表面波，因而克服了一般的超声马达结构复杂，制造困难以及小型化困难等缺点。
Because its driving signal is surface acoustic wave, thus it overcomes the shortcomings of complex structure, difficult fabrication and miniaturization in normal ultrasonic motor.
分析了叉指形电极压电驱动器的结构特点和电场结构。
Firstly, the structure and electric field of interdigitated electrode piezoelectric ceramic actuator were studied.
分别设计了平行板、叉指下电极和栅格、条形上电极结构。
The lower electrodes are in the form of plates or interdigital structure while the upper electrode is a plate with slot or grid.
这是因为有更多的界面态的影响，由于叉指式电极配置引入。
This is because that more influences of interface state were introduced due to the interdigital electrode configuration.
这是因为有更多的界面态的影响，由于叉指式电极配置引入。
This is because that more influences of interface state were introduced due to the interdigital electrode configuration.
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