利用ICP -CVD工艺制备出一种新型厌水性碳氟聚合物薄膜，并给出了制备薄膜的工艺参数。
It puts forward the techniques of depositing hydrophobic thin films of the fluorocarbon polymer by ICP-CVD and the process factors of ICP-CVD.
利用ICP -CVD工艺制备出一种新型厌水性碳氟聚合物薄膜，并给出了制备薄膜的工艺参数。
It puts forward the techniques of depositing hydrophobic thin films of the fluorocarbon polymer by ICP-CVD and the process factors of ICP-CVD.
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