该机床采用压电陶瓷直线电机和光栅尺构成高精密的伺服驱动系统来满足微细、高精度加工的要求。
The piezoceramics linear driving system of closed loop control combined with a raster rule of high distinguishability is applied in the machine to meet the demand of microfabrication.
该机床采用压电陶瓷直线电机和光栅尺构成高精密的伺服驱动系统来满足微细、高精度加工的要求。
The piezoceramics linear driving system of closed loop control combined with a raster rule of high distinguishability is applied in the machine to meet the demand of microfabrication.
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