针对扫描探针显微镜的压电扫描器提出一种非线性校正方法。
A calibration method for the non-linearity of the Scanning Probe Microscope (SPM) "s PZT scanner was described."
介绍了全新概念的低温压电角扫描器(PZTA)的理论特性和制作技术。
The theory characteristics and the making technique of a novel piezoelectric optical Angle scanner (PZTA) are introduced in this paper.
三维压电陶瓷扫描器是扫描探针显微镜的关键部件。
The piezoelectric scanner is one of the key components of scanning probe microscope.
介绍了新型压电驱动器和扫描器的工作原理，测试了扫描器的频响特性。
The principle of the novel piezoelectric actuator and the scanner were described, and the frequency response was measured.
本文作者设计制作了一种复合型三维压电陶瓷扫描器，并对扫描器的性能进行了检测。
A compound three-dimensional piezoelectric scanner has been designed and constructed. The performances of piezoelectric scanner have been investigated.
本文作者设计制作了一种复合型三维压电陶瓷扫描器，并对扫描器的性能进行了检测。
A compound three-dimensional piezoelectric scanner has been designed and constructed. The performances of piezoelectric scanner have been investigated.
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