提供一种群管理系统、半导体制造装置以及信息处理方法。
A group management system, a semiconductor manufacturing device and an information processing method are provided.
半导体制造中的自动组合装置是半导体制造的关键设备和瓶颈设备。
Cluster tools are the critical equipment for semiconductor manufacture, and usually, the bottleneck equipment.
本发明涉及扩散薄膜的沉积方法和装置，用于半导体制造和各种工其的表面涂覆中。
This invention relates to a method and apparatus for deposition of a diffused thin film, useful in the fabrication of semiconductors and for the surface coating of various tools.
半导体制造中的自动组合装置是半导体制造的关键设备和瓶颈设备。
The manufacture process involves the participation of over hundred procedures and many key equipment, which includes so-called cluster tools.
半导体制造中的自动组合装置是半导体制造的关键设备和瓶颈设备。
The manufacture process involves the participation of over hundred procedures and many key equipment, which includes so-called cluster tools.
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