本发明还提供含有由上述式（I）表示的盐的化学放大型抗蚀剂组合物。
The invention further provides a chemically amplified positive resist composition comprising the salt represented by the formula (I).
本发明还提供含有由上述式（I）表示的盐的化学放大型抗蚀剂组合物。
The invention further provides a chemically amplified positive resist composition comprising the salt represented by the formula (I).
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