本发明的目的在于，获得可用MOS工艺制造的、且可实现稳定动 作的半导体存储装置。
The object of the invention is to obtain a semiconductor storage which operates stably and can be produced by an MOS process.
半导体集成电路具有静电型致动器、检测电路、存储电路及偏置电路。
A semiconductor integrated circuit comprises an electrostatic actuator, an estimation circuit, a storage circuit and a bias circuit.
接口具有向内突起的外部导体止动件。
The interface having an inward projecting outer conductor stop.
接口具有向内突起的外部导体止动件。
The interface having an inward projecting outer conductor stop.
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