将谐振原理应用于硅微机械加速度计中，可以改善后者输出信号的质量，降低检测难度。
If resonant elements are adopted in MEMS accelerometer, the quality of the signal output can be improved, and therefore the detection will be easier.
以一种梁-质量块结构的加速度计为模型，为了在加工过程中，得到完整的质量块结构，使结构具有更好的对称性，对各种凸角补偿方式进行了研究。
To acquire intact mass structure with better symmetry, various methods of convex corner compensation were studied based on a sort of accelerometer of beam-mass structure.
本文证明了带硅质量块的铝纳米梁结构可以形成一种加速度计。
The nano-beams with silicon block can be seen as accelerometer is proved.
本文证明了带硅质量块的铝纳米梁结构可以形成一种加速度计。
The nano-beams with silicon block can be seen as accelerometer is proved.
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