本论文主要研究内容：首先，设计了基于PSD的激光加速度计系统的结构，针对此结构推导了该数字式力平衡加速度计输出脉冲差与输入加速度之间的关系。
Firstly, the structure of the laser accelerometer based on PSD are designed in this dissertation. The relation between the output pulse difference and the input acceleration is derived.
介绍了力平衡式硅加速度计的设计，勾画了MEMS产品的一般设计思路和方法。
By introducing the design of the force balance silicon accelerometer, this paper describes the ideas and methods of the MEMS products.
在实验中发现，力平衡式加速度计的施力电压变化范围和传统计算中的并不相同。
The voltage on the forcer of a force-rebalance accelerometer in some experiments is different from the one used in traditional calculations.
在实验中发现，力平衡式加速度计的施力电压变化范围和传统计算中的并不相同。
The voltage on the forcer of a force-rebalance accelerometer in some experiments is different from the one used in traditional calculations.
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