报道了用氦离子注入智能剥离形成SOI结构硅片的新技术，介绍了这种技术的工艺和用剖面透射电镜研究的结果。

A new technology of smart cut using helium ion implantation to form SOI was presented. The process of smart cut was introduced and research results was demonstrated by means of XTEM in this paper.

youdao

报道了用氦离子注入智能剥离形成SOI结构硅片的新技术，介绍了这种技术的工艺和用剖面透射电镜研究的结果。

A new technology of smart cut using helium ion implantation to form SOI was presented. The process of smart cut was introduced and research results was demonstrated by means of XTEM in this paper.

youdao