论述了冷阴极离子源及其在真空镀膜中的应用。
In vacuum deposition, using of the cold cathode ion source can reduce the deposition period.
采用五栅网离子能量测量装置和法拉第筒测量了宽束冷阴极离子源的离子能量和离子束流密度。
The ion energy and the density of beam flux of cold cathode ion source were measured by pentagrid probing and Faraday cup.
采用五栅网离子能量测量装置和法拉第筒测量了宽束冷阴极离子源的离子能量和离子束流密度。
The ion energy and the density of beam flux of cold cathode ion source were measured by pentagrid probing and Faraday cup.
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