高量程MEMS加速度传感器是测量高冲击过程的核心器件。
High-g MEMS accelerometer sensor is the key device for measuring acceleration during high shock process.
压力测量要求的压力源连接到传感器,加速度震动或冲击检测需要在一些已知的频率和力量的装置。
Pressure measurements require a pressure source to be connected to the sensor; acceleration or shock detection requires shaking the device at some known frequency and force.
通过冲击试验,证明了该加速度传感器在高加速度作用下的实用性。
Through shocking experiment, it is proven that this kind of the shocking accelerometer is available in practice.
由此,增加每个制动器的断裂强度,并因此获得具有优良抗冲击性的半导体加速度传感器。
Thereby, the breaking strength of each stopper is increased, and hence a semiconductor acceleration sensor having superior shock resistance can be obtained.
由此,增加每个制动器的断裂强度,并因此获得具有优良抗冲击性的半导体加速度传感器。
Thereby, the breaking strength of each stopper is increased, and hence a semiconductor acceleration sensor having superior shock resistance can be obtained.
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