本文设计的微气压传感器的制作工艺与集成电路工艺兼容，结构上主要包括加热电阻、敏感元件和测试电阻等三部分。
The micro gas pressure sensor designed in this thesis can be fabricated using an IC compatible process, and it is composed of a heating resistor, a sensitive element and a testing resistor.
巨磁阻抗软磁薄膜因为在制备上与集成电路工艺具有兼容性而在传感器等工程领域具有广阔的应用前景。
GMI films are sure to be widely used in the field of sensors for its compatibility with IC technology.
巨磁阻抗软磁薄膜因为在制备上与集成电路工艺具有兼容性而在传感器等工程领域具有广阔的应用前景。
GMI films are sure to be widely used in the field of sensors for its compatibility with IC technology.
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