本论文针对热光可调谐光学薄膜滤波器的结构设计和非晶硅薄膜的PECVD制备工艺展开研究。
The research in this paper is mainly about the structural designing of the tunable thin film filter and the processing of amorphous silicon membrane depositing by PECVD.
本论文针对热光可调谐光学薄膜滤波器的结构设计和非晶硅薄膜的PECVD制备工艺展开研究。
The research in this paper is mainly about the structural designing of the tunable thin film filter and the processing of amorphous silicon membrane depositing by PECVD.
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