本文从投影光刻机的图形传递要求出发,导出投影光刻机各主要光学系统的具体要求,并讨论这些参数确定的局限性。
The specific parameters of main optical system are deduced from the requirement of pattern transfer for the projection aligner. The limit of these parameters is discussed.
方法设计的焦度计主要由照明系统、准直系统、投影光学系统组成。
Methods The designed lensometer primarily consists of light system, collimating system and projective system.
与传统的光学测量方法不同,测量系统采用两个CCD相机记录投影光栅,减小了测量误差,提高了测量精度。
Differing from the traditional optical measuring method, the measuring system USES two CCD cameras to record projection grating, thus reduces errors and improves measuring accuracy.
对投影型微光学编码器的原理进行了分析,结合微机电系统集成技术,提出并实现了投影型微光学编码器。
The principle of projection type micro optical encoder has been described and the optics theory of grating imaging is deduced.
投影系统的设计,可用验 证这些功能如何让光学工程师能几乎毫无隔阂的在同的分析模式下使用。
The design of a projection system was used to demonstrate how these capabilities allow an optical designer to move almost seamlessly between the different modes of analysis.
本文介绍了一种用于大型土木工程结构的投影式光学挠度测量系统。
In this paper, a novel system is developed for the measurement of deflection of large structures.
文中以透视投影变换为依据,为基于两台经纬仪形成的一种非接触式光学柔性三坐标测量系统提出了一全新的数学模型。
In terms of perspective projection transformation, a novel mathematical model is proposed for a non contacting optical flexible 3d measurement system constructed by the two theodolites.
本文讨论内屏式彩色投影管光学系统设计方法。
The purpose of this paper is to discuss the methods of optics system design of color Schmidt projection tube.
实验系统光源采用数字光学投影仪,并用计算机生成电子光栅。
A digital optical projector is used as the optical source, and the electrical grating is generated by computer.
整个光学系统采用锗和硅两种材料,包含11片透镜,其中:准直物镜3片,投影镜头7片,场镜1片。
The whole optical system using the materials of Ge and si consisted of 11 elements, including 3 lenses for collimator and 7 lenses for the projection system.
该装置的光学系统包括透镜、反射镜及投影屏等,其它部分包括载有各种发型模式影像的胶片。
The optical system of the device comprises a lens, a reflecting lens, a projection screen, etc. Other parts of the device comprise image films with various hair style modes.
红外目标模拟器由红外目标图像发生器和投影光学系统组成。
The infrared target simulator is composed of infrared target image transmitter and the optical projection system.
描述了投影显示关键参数(分辨率、对比度、投影光学、系统的光通量、彩色化、灯及屏幕)及优化方法。
The key parameters of projection display, including resolution, contrast, projection optics, optical throughput, color, light source and screen and their optimum method were described.
介绍了光刻投影系统的组合集成,详细分析了该系统的成像特点及光学性能。
Integration of the system is described, the characteristics of the photolithographic imaging system are analyzed in detail.
从投影显示系统典型的动态聚焦方法与投影管特殊的荧光屏结构以及光学处理等方面对投影显示系统的动态聚焦电压误差进行研究。
Dynamic focus voltage error of projection display system was studied in this article. Parabola dynamic focus method, projection tube shape and optics processing were analyzed.
光学引擎是决定LCD投影系统色度、光度品质的核心部件之一。
Optical engine is one of the key components to affect the qualities of the chroma and luminosity in LCD projectors.
所述显示系统还包括第二光学系统,其光耦合到所述空间光调制器,并且适于将图像投影到投影表面上。
The display system further includes a second optical system coupled to the spatial light modulator and adapted to project an image onto a projection surface.
大视场投影光刻物镜是光学系统中的一种特殊的形式,其设计加工要求高。
The large field projection lithography lens is a special optical lenses form, which put an high demands on the design and processing both for mechanical and optical.
在投影机使用环境中防尘非常重要,一定要严禁吸烟,因烟尘微粒更容易吸附在光学系统中。
In the projector use of the environment is very important in the dust, smoking must be prohibited, because of dust particles more easily adsorbed on the optical system.
其中光学系统是该设备的重要组成部分。它是一个长焦距、大视场的投影光学系统。
The optical system is a projective optical system with long focus and large field of view, and is an important part of the equipment.
本实用新型的光学系统包括反射镜、透镜及投影屏等,其它部分包括载有各种发型模式影像的胶片。
The optical system of the utility model comprises a reflecting lens, an optical lens, the projection screen, etc. Other parts comprises image films with various hair style patterns.
本文提出了一种可用于集成电路装配和质量控制的、带有双投影物镜和全息光学元件散射全息屏幕的投影型全息显微镜(PHM)系统。
A projection-type holographic microscope with double projection-objectives and a holographic screen used for integrated circuits assembly and quality control is described.
本文提出了一种可用于集成电路装配和质量控制的、带有双投影物镜和全息光学元件散射全息屏幕的投影型全息显微镜(PHM)系统。
A projection-type holographic microscope with double projection-objectives and a holographic screen used for integrated circuits assembly and quality control is described.
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