落在一个标准偏差之外的概率是1/3,两个标准差之外的概率是1/20,三个标准差之外是百分之一
One standard deviation happens one draw out of three, two standard deviations one out of twenty, three standard deviations is one out of one hundred.
相对于传统PID主从同步控制方法,同步偏差的移动平均差减小18.2%,移动标准差减小61.5%,可以保证光刻机的曝光效果。
Compared with the conventional PID masterslave control method, the move mean difference is reduced by 18.2% and the move standard deviation is reduced by 61.5%, and the exposure effect can be ensured.
相对于传统PID主从同步控制方法,同步偏差的移动平均差减小18.2%,移动标准差减小61.5%,可以保证光刻机的曝光效果。
Compared with the conventional PID masterslave control method, the move mean difference is reduced by 18.2% and the move standard deviation is reduced by 61.5%, and the exposure effect can be ensured.
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