提高作为纳米科技的“眼”和“手”的扫描探针显微镜(SPM)的测量和定位精度，是纳米仪器界始终追求的目标。
It is an objective for nanometer instrument researcher to improve the measurement precision of scanning probe microscope (SPM), the eye and hand of nanometer science and technology.
测量中，把扫描隧道显微镜的探针扫描线作为参考栅，把物质原子晶格栅结构作为试件栅，对这两组栅线干涉形成的云纹进行了纳米级变形测量。
In the measurement, the moire pattern is generated by the scanning line of scanning tunneling microscope and the atomic lattice of substance as a specimen grating.
测量中，把扫描隧道显微镜的探针扫描线作为参考栅，把物质原子晶格栅结构作为试件栅，对这两组栅线干涉形成的云纹进行了纳米级变形测量。
In the measurement, the moire pattern is generated by the scanning line of scanning tunneling microscope and the atomic lattice of substance as a specimen grating.
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