由于不要求被测样本为非绝缘体，原子力显微镜将可能成为边缘粗糙度测量精度要求不断提高的最有效工具。
AFM may be the most effective instrument to satisfy the demand of ITRS to improve the measurement precision constantly since its observed objects are not limited in nonconductor only.
由于不要求被测样本为非绝缘体，原子力显微镜将可能成为边缘粗糙度测量精度要求不断提高的最有效工具。
AFM may be the most effective instrument to satisfy the demand of ITRS to improve the measurement precision constantly since its observed objects are not limited in nonconductor only.
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