• 采用微机械加工技术硅硅合技术可以实现高性能加速度传感器。

    Using bulk micromachining and silicon bonding we can achieve high-performance full-silicon sandwich accelerometer.

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  • 加工工艺方面,机械加工相比表面微机械加工具有工艺简单,容易CMOS电路集成等优点

    Compared with bulk micromachining, the surface micromachining has the advantages of low manufacturing cost and easy integration with CMOS circuits.

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  • 电子机械系统(MEMS)结合电子技术微机械加工技术制造而成机电一化系统

    Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.

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  • 机械加工技术应用传感器研究,制备薄膜生物传感器。

    An integrated thin film microbiosensor was developed based on a micromachining techniques.

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  • 论文比较各种类型开关特点基础结合现有工艺条件,完成了一种使用常规微机械加工工艺实现的光开关设计制作。

    Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.

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  • 论文比较各种类型开关特点基础结合现有工艺条件,完成了一种使用常规微机械加工工艺实现的光开关设计制作。

    Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.

    youdao

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