采用体声波传感技术就卤素离子与铜缓蚀剂——苯骈三氮唑(BTA)协同成膜的动力学及相应复合膜的稳定性进行了研究。
The growth kinetics and the stability of synergistic films of benzotriazole (BTA) and halide ion (X -) were investigated by bulk acoustic wave (BAW) method.
采用体声波传感技术就卤素离子与铜缓蚀剂——苯骈三氮唑(BTA)协同成膜的动力学及相应复合膜的稳定性进行了研究。
The growth kinetics and the stability of synergistic films of benzotriazole (BTA) and halide ion (X -) were investigated by bulk acoustic wave (BAW) method.
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