现在已经采用了低温吸附技术和吸气离子泵的近代电子抽气设备。
Recent electronic means of pumping using low temperature sorption techniques and getter-ion pumps have been introduced.
本发明的低温吸附组合抽气装置，不需要液氮储存筒，具有结构简单、紧凑、小 巧的特点。
Storage cylinder for liquid nitrogen is not needed in the invention and its structure is simple and compact so on.
本发明的低温吸附组合抽气装置，不需要液氮储存筒，具有结构简单、紧凑、小 巧的特点。
Storage cylinder for liquid nitrogen is not needed in the invention and its structure is simple and compact so on.
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