本论文以超精密机床用永磁同步直线电机驱动进给伺服系统位置控制器为研究对象。
In this paper, the research object is the position controller of a permanent magnet linear motor direct drive feed servo system.
本论文以超精密机床用永磁同步直线电机驱动进给伺服系统位置控制器为研究对象。
In this paper, the research object is the position controller of a permanent magnet linear motor direct drive feed servo system.
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