• 元件制程:蚀刻表面钝化介电材料薄膜

    Device Processing: Etching. Surface passivation; dielectric films.

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  • PS T薄膜一种具有优良铁电、热释电介电性能的铁电材料

    PST thin films are ferroelectric materials with many advantages such as excellent ferroelectric, pyroelectric and dielectric properties.

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  • 均一pzt薄膜材料相比,由致密多孔层交替排列形成的近周期PZT多层膜具有电、介电增强效应。

    Compared with the uniform PZT thin films, the PZT multilayer with alternating dense-PZT and porous-PZT layers exhibits an enhancement both in ferroelectric and dielectric performances.

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  • 对于用作集成电路的层间介电改善性能,确定包含该材料薄膜及其制备方法

    Low dielectric materials and films comprising same have been identified for improved performance when used as interlevel dielectrics in integrated circuits as well as methods for making same.

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  • 本文简要介绍了电子陶瓷系统中绝缘体介电质、压电薄膜材料及其制备工艺应用方面一些进展

    In this paper, Some of the recent developments in materials, processes and applications for dielectrics, piezoelectrics, and ferroelectric thin...

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  • 本文简要介绍了电子陶瓷系统中绝缘体介电质、压电薄膜材料及其制备工艺应用方面一些进展

    In this paper, Some of the recent developments in materials, processes and applications for dielectrics, piezoelectrics, and ferroelectric thin...

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