元件制程:蚀刻,表面钝化,介电材料薄膜。
Device Processing: Etching. Surface passivation; dielectric films.
PS T铁电薄膜是一种具有优良铁电、热释电和介电等性能的铁电材料。
PST thin films are ferroelectric materials with many advantages such as excellent ferroelectric, pyroelectric and dielectric properties.
同均一相pzt薄膜材料相比,由致密层和多孔层交替排列形成的近周期PZT多层膜具有铁电、介电增强效应。
Compared with the uniform PZT thin films, the PZT multilayer with alternating dense-PZT and porous-PZT layers exhibits an enhancement both in ferroelectric and dielectric performances.
对于在用作集成电路的层间介电体时的改善性能,确定了低介材 料和包含该材料的薄膜及其制备方法。
Low dielectric materials and films comprising same have been identified for improved performance when used as interlevel dielectrics in integrated circuits as well as methods for making same.
本文简要介绍了电子陶瓷系统中绝缘体、介电质、压电体及铁电薄膜材料及其制备工艺和应用方面的一些新进展。
In this paper, Some of the recent developments in materials, processes and applications for dielectrics, piezoelectrics, and ferroelectric thin...
本文简要介绍了电子陶瓷系统中绝缘体、介电质、压电体及铁电薄膜材料及其制备工艺和应用方面的一些新进展。
In this paper, Some of the recent developments in materials, processes and applications for dielectrics, piezoelectrics, and ferroelectric thin...
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