研究设计了一种亚稳态氦原子束源系统。
A system of metastable helium atom beam source has been developed.
用亚稳态氖原子束进行了原子光刻实验。
The atomic lithography experiments were carried out by use of a metastable neon atomic beam.
用亚稳态氖原子束进行了原子光刻实验。
The atomic lithography experiments were carried out by use of a metastable neon atomic beam.
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