本文阐述了微型机电系统(MEMS)领域中微泵的几种常见的致动方式及其特点。
Several common micro mechanical driving modes as well as their characteristic of micro-pump in MEMS field are described in this paper.
本文阐述了微型机电系统(MEMS)领域中微泵的几种常见的致动方式及其特点。
Several common micro mechanical driving modes as well as their characteristic of micro-pump in MEMS field are described in this paper.
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