图中间的透镜起缩小掩模图案的作用,使得在晶圆上得到的电路图案长度上是掩模的四分之一。
A lens (middle) reduces the mask's image. So what gets printed on the wafer is typically four times smaller linearly than the mask's pattern.
它由外层密封恒温外套、中间层镜筒、内层为分隔固定光学透镜元件的透镜框组件组成。
It consists of outer layer sealing constant temperature jacket, middle layer objective sleeve and inner layer as lens frame to partition and fix optical lens elements.
它由外层密封恒温外套、中间层镜筒、内层为分隔固定光学透镜元件的透镜框组件组成。
It consists of outer layer sealing constant temperature jacket, middle layer objective sleeve and inner layer as lens frame to partition and fix optical lens elements.
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