本发明公开了一种电磁加热装置，主要解决半导体衬底加热不均匀问题。
The invention discloses an electromagnetic heating device and mainly solves the problem that a semiconductor underlay is heated unevenly. The device comprises a heating body and a coil.
本发明公开了一种电磁加热装置，主要解决半导体衬底加热不均匀问题。
The invention discloses an electromagnetic heating device and mainly solves the problem that a semiconductor underlay is heated unevenly. The device comprises a heating body and a coil.
应用推荐