Among a host of other developmental problems, EUV must operate in a nearly perfect vacuum.

FORBES: Three Investments That Will Change The Technology Game

The specific technology areas that Intel is investing in are 450mm wafers and extreme ultraviolet (EUV) lithography.

FORBES: Three Investments That Will Change The Technology Game

Under the Co-Investment Program, which was announced on July 9, 2012, ASML will accelerate the development of key lithography technologies needed to extend Moore's Law, notably Extreme Ultraviolet (EUV) lithography.

ENGADGET: Acronym-loving Samsung joins Intel and TSMC, buys stake in ASML