放电为磁场激励型，稳定的等离子体由电磁场所维持，空间电荷产生的静电场引起荷电粒子的双极扩散。
A steady state plasma is maintained by electromagnetic field and ambipolar diffusion of charged particles is caused by electrostatic field of space charge.
大量静电荷可能在床内积聚而引起火花放电。
Large static charges may build up in the bed causing spark discharges.
静电放电(esd)是指一定量的电荷从一个物体(例如人体)转移到另一个物体上(例如芯片)的过程。
Electrostatic discharge (ESD) is a process in which a finite amount of charge is transferred from one object (i. e., human body) to the other (i. e., microchip).
ESD -即静电放电之意。指不同电位的二个物体之间产生的电荷急骤流动的现象。
Electrostatic Discharge (ESD) -the transfer of electrostatic charge between bodies or surfaces at different electrostatic potential. ESD is a subset of EOS.
ESD -即静电放电之意。指不同电位的二个物体之间产生的电荷急骤流动的现象。
Electrostatic Discharge (ESD) -the transfer of electrostatic charge between bodies or surfaces at different electrostatic potential. ESD is a subset of EOS.
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