这种薄膜具有很小的压应力,很低的针孔密度,良好的台阶覆盖性等优点。
The films have advantages of slightly compressive stress, very low pin-hole density and superior step coverage.
当剂量增加到足以溅射掉第一代表面发泡时,针孔形成,针孔的密度随剂量增加而增加。
At doses high enough to sputter the first-generation blisters, Pinholes can be formed and pinhole density increased with increase in the total dose.
利用带有针孔的透射式光栅光谱仪研究了激光等离子体X射线辐射的原子序数依赖性和激光功率密度对辐射的影响。
This paper presents the studies of the dependence of soft X-ray emission on atomic-number and laser intensities by using a new diagnostic tool, pinhole transmission grating spectrograph (PTGS).
利用带有针孔的透射式光栅光谱仪研究了激光等离子体X射线辐射的原子序数依赖性和激光功率密度对辐射的影响。
This paper presents the studies of the dependence of soft X-ray emission on atomic-number and laser intensities by using a new diagnostic tool, pinhole transmission grating spectrograph (PTGS).
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