本文介绍用于微型机械LIGA工艺的精密电铸设备。
A precision plating device applied to LIGA technology is introduced in this paper.
文内给出了精密电铸设备的技术参数、系统结构、软件流程及初步实验效果。
The paper gives the technical parameters, the structure, the control Software and the initial experiment results of the device.
文内给出了精密电铸设备的技术参数、系统结构、软件流程及初步实验效果。
The paper gives the technical parameters, the structure, the control Software and the initial experiment results of the device.
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