本发明提供一种排列有多个离子束引出孔的离子管，使得离子束电流密度变得均匀。
The invention provides an ion pipe with a plurality of ion beam extraction holes, so that the ion beam current density becomes uniform.
完成电路连接之后，接通偏置电压，在没有离子束电流的情况下进行电流测量，以验证系统能够正常工作。
After the connections are made, verify the system is working properly by turning the bias voltage on and taking a current measurement with no ion beam current.
本发明提供一种离子管及离子束的引出方法，离子管排列有多个离子束引出孔，使得离子束电流密度变得均匀。
The invention provides an ion pipe and ion beam extraction method, wherein the ion pipe is arranged with a plurality of ion beam extraction holes, so that the ion beam current density becomes uniform.
感应装置可包括一屏蔽以及一用以平移屏 蔽以便界定相关联的法拉第感应器的一部分上的离子束电流感应器的机 构。
The sensing device may include a mask and a mechanism to translate the mask in order to define a beam current sensor on a portion of an associated Faraday sensor.
弱电流测量的各种应用包括电容器的漏电、弱电流半导体、光和离子束测量等。
Low current measurement applications include capacitor leakage, low current semiconductor, light, and ion beam measurements.
弱电流测量的各种应用包括电容器的漏电、弱电流半导体、光和离子束测量等。
Low current measurement applications include capacitor leakage, low current semiconductor, light, and ion beam measurements.
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