一种公共分配中心，向自动化晶片处理系统中的各个部分提供所有的电源、气体、化学原料和其它服务。
A common distribution core that provides all electrical power, gases, chemicals, and other services to the sectors of an automated wafer processing system.
同时，本机器人还包括信息处理系统，以及电源供电系统。
Meanwhile, the robot also comprises an information processing system and a power supply system.
结果系统的质量不仅与废水处理系统本身的结构参数、操作参数有关，而且与电源系统和热控系统的工作特性关系密切。
Result The system mass depended not only on the structural parameters and operational parameters of TIMES, but also on the operational characteristics of power subsystem and thermal control subsystem.
结果系统的质量不仅与废水处理系统本身的结构参数、操作参数有关，而且与电源系统和热控系统的工作特性关系密切。
Result The system mass depended not only on the structural parameters and operational parameters of TIMES, but also on the operational characteristics of power subsystem and thermal control subsystem.
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