电疲劳失效是阻碍铁电陶瓷材料应用于微驱动和微执行器件的主要原因。
The electric fatigue and failure have significantly impeded the commercial applications of ferroelectric ceramics in micro-actuator and micro-performer devices.
该系统以pwm方式对执行器件(固态继电器)进行调节，实现了对电阻炉温度的精确控制。
To achieve precise control, the PWM mode is used to control the execution component (SSR) to adjust the resistance furnace temperature.
形状记忆材料是一种重要的智能材料，主要作为执行器件材料，被广泛的用在建筑、航空航天、军事和医学等领域。
Shape memory materials is important as intelligent materials, mainly used as actuator in Architecture, aeronautics, army and medical fields.
该平台基于压电陶瓷执行器件，采用计算机控制，除达到了高精度快速地组装与测试的基本功能，还具有过程自动化的特点。
The bed are based on piezoelectric ceramic device and controlled by computer. It reaches the goal of high precision, quick assembly, and automatic operation at the same time.
利用SU -8光刻胶为主要材料，采用多级曝光和电铸金属实现3D结构的工艺技术，研制出了微针执行器的雏形器件。
The rudiments of microneedle actuator have been developed, which is mainly made of SU 8 photoresist, and its 3D construction is fabricated by multistep exposal and electroforming metal.
微机械射频开关作为MEMS执行器的一种，是微机械技术中的一类有代表性的结构，是很多微机械器件的基础。
As a kind of MEMS actuators, micro mechanical radio frequency switch is a representational structure of micromechanical technology, and basis of many micro mechanical components.
风门执行器：控制风门的电动执行器采用进口器件，运行可靠，抗干扰，寿命长，拆装方便。
Damper actuators: the control of the new electric fan damper actuator using imported components, reliable operation, anti-jamming, long life and easy disassembly.
介绍了MEMS的特点、特征、技术发展趋势，MEMS器件的类型及其功能，并以多层弯曲磁芯结构微执行器为例介绍了磁驱动微执行器工作原理与制作工艺过程。
In this paper, the feature and the development trend of the MEMS technology are introduced. And the operational principles and the fabrication craft of the magnetic micro-actuator with a mult...
介绍了MEMS的特点、特征、技术发展趋势，MEMS器件的类型及其功能，并以多层弯曲磁芯结构微执行器为例介绍了磁驱动微执行器工作原理与制作工艺过程。
In this paper, the feature and the development trend of the MEMS technology are introduced. And the operational principles and the fabrication craft of the magnetic micro-actuator with a mult...
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