介绍了一种由非硅微加工技术制作的电热微驱动器。
A novel electro-thermal actuator is presented by using non-silicon micro fabrication technology.
文中将涉及微加工技术以及从直流至射频的多芯片全集成新概念。
The concepts of "micromachining" and Multi-Chip-Module (MCM) integrated from DC to RF components will be explained also.
利用微加工技术，我们还将微加热器和温度传感器集成到本芯片上。
Using micromachining technology, we also integrated micro-heater and temperature sensor on the chip.
给出基于硅微加工技术的一种新型可变形反射镜的设计和加工方法。
The design and fabrication of a novel deformable mirror based on silicon micromachining technology was presented in this paper.
该传感器应用微加工技术制成，具有测试加速度值大、响应速度快等特点。
The micro sensor array of the acceleration is made by the technology of IC manufacture and characterized by measuring large value of the acceleration, and rapid response.
生物芯片是现代微加工技术和生物技术的结晶是具有一定生物功能的微晶片结构。
Biochip is a modern technology of micro-fabrication coupled with modern biotechnology. It is a microchip structure with specific biological functions.
基于体硅微加工技术设计并制作了一种新型的采用静电驱动的连续面型可变形反射镜。
A novel electrostatic actuated deformable mirror with continuous facet is designed and fabricated by using silicon bulk micromachining technology.
本硕士论文对基于非硅基微加工技术的光开关及可调光衰减器的设计制作与分析进行了研究。
This thesis presents a study on the non-silicon based MEMS optical switch and variable optical attenuator.
微通道反应器，是一种借助特殊微加工技术以固体基质制造的可用于进行化学反应的三维结构单元。
Micro-channel reactor is a 3-dimensional structure unit used for chemical reaction in fuel cell, manufactured through special micro-processing of solid matrix.
采用微加工技术将芯片的细胞电融合小室制作成微电极阵列以实现细胞的大量融合，提高细胞的融合效率。
The cell fusion room of chip was completed by MEMS and made into an array of the microelectrode to realize huge cell fusion and to improve the efficiency of cell fusion.
介绍了利用微加工技术制造的电容式压力微传感器的结构设计，主要分析了其工作原理，论证了测量电路的可行性。
The specific structure force micro-sensor on capacitor is introduced in this paper. Principle and survey circuit design are argued and analyzed.
本文介绍了选用优质石英为芯片基体材料的一种制作方法，关键技术包括标准的光刻，湿法腐蚀，键合等微加工技术。
This paper introduces a fabricated method of using fused silica as the chip material. It includes standard photolithography, wet chemical etching and bonding techniques.
介绍了几种在传感器制作中常用的微机械加工工艺，举例说明用微加工技术制作的角速率传感器及加速度传感器的结构及性能。
Some commonly used micromachining technologies are introduced, few examples are also shown to illustrate the structure and performance of rate and acceleration sensors used these technologies.
生物芯片是在微小面积上，利用微加工技术，并结合有关的化学合成技术制造而成的一种具有一定分子生物学检验功能的微型器件。
Biochip is in the small area, using of micro-processing technology, combined with the chemical synthesis technology to create micro-devices, which have the function of molecular biology test.
其结果对进一步开展这方面的研究工作具有指导意义，在进一步深入开展研究电化学体硅微加工技术时，可有望成为实现硅深孔列阵加工的新技术。
The consequences are benefit to Silicon electrochemical micromachining technology and the technology will be hopeful to become an new technology about Silicon deep-holes etching technology.
与其它微加工技术比较，使用此方法除可制作复杂的三维微结构外，同时它又具有免用光罩、制作步骤简单、真正三维的立体结构及高解析度之优点。
By use of this technique, we fabricated scaffold-like micro-well structures with sub-micron resolution and high aspect ratio by both raster scanning and pinpoint scanning methods.
提出了一种新颖的基于微纳米加工技术的MOEMS空间谐振腔结构，介绍了其工作原理和系统构成。
A novel MOEMS spatial resonator based on micro-nano machining technology was put forward. The principle and structure of the resonator were introduced.
微电铸，又称精密电铸，是一种全新的微细加工技术。
As a new micro fabrication technology, micro electroforming I.
采用微磨料气射流加工技术(MAJM)，对普通硅酸盐玻璃进行微流道槽加工。
The micro abrasive jet machining (MAJM) technology was used to make micro channels on the glass.
介绍了一种基于硅体加工技术以及阳极键合技术的微热管阵列。
This paper investigates one kind of micro heat pipe arrays (MHPA), which are fabricated by advanced silicon bulk micromachining and anodic bonding technology.
HDI材料技术、细间距电路形成和微导通孔形成的加工技术支持了积层多层板的开发。
This development of build up-type multilayer PWB is supported by HDI materials' technology, as well as processing technology for fine-pitch circuit formation and fine-via formation.
中心的研究方向，主要从事微纳米加工技术、微纳米材料以及微纳米器件与系统的研究与应用，并为国内外产业及研究机构服务。
Thee current research fields of the center are micro and nano fabrication technologies, micro and nano materials, and micro and nano systems.
飞秒激光加工技术已经为材料的微纳加工提供了有力的手段。
Femtosecond laser ablation is an important method in processing materials.
微磨料水射流加工技术正成为制造微细结构零件重要的经济高效的微细加工技术。
Micro abrasive water jet machining (MAJM) is becoming an important machining technique for cost effective micro machining.
针对激光陀螺反射镜常用材料微晶玻璃的加工技术，介绍了一种较为成熟的超光滑表面加工方法—定偏心浸液式抛光。
Nano-particle colloid jet polishing is a new kind of ultra-precision machining technology which has important research and application value in fabricating ultra smooth surface.
采用微细加工技术制作出无基底的双材料微悬臂梁阵列结构。
The micro-electromechanical system (MEMS) technology is adopted to fabricate the substrate-free bi-material micro-cantilever arrays.
在此基础上采用飞秒激光双光子微细加工技术制备了典型的微生物器件——微井阵列、微柱阵列和光子晶体生物微型支架。
Using two-photon femtosecond laser micro-processing technology fabricates a typical microbial devices such as micro-well array, micro-pole-array, and photonic crystal micro-biological scaffold.
在此基础上采用飞秒激光双光子微细加工技术制备了典型的微生物器件——微井阵列、微柱阵列和光子晶体生物微型支架。
Using two-photon femtosecond laser micro-processing technology fabricates a typical microbial devices such as micro-well array, micro-pole-array, and photonic crystal micro-biological scaffold.
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